Microelectronics
FabricationLaboratory |
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Charles D.
Ellis, DirectorWilliam Baugh, Equipment Eng |
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Education
Semiconductor Fabrication
Course
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The primary function of the AMSTC Microelectronics Laboratory
is making sure our engineering students receive the best education
possible. We do that by providing laboratory courses that allow
the students to have hands-on experience. After completing these
unique courses, our students will have obtained a high level of
understanding about fabrication of semiconductor devices. Auburn
is one of a handful of universities, across the nation that offers
this type of training to both undergraduate and graduate students.
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Graduate
Students
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ECE 6370 Class Project Chip
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The equipment in the AMSTC Microelectronics Laboratory includes
an array of modern Integrated Circuit and Nano-Fabrication systems.
We have upgraded Metallization, Deep Reactive Ion Etching, and
Mask Aligning systems within the last year.
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E-beam / Sputter
System |
Deep Reactive Ion Etcher |
Double Sided Mask Aligner |
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Diffusion / Oxidation Furnace
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LPCVD Furnace |
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| MEMS (Micro Electro-Mechanical
Systems ) and Bio Medical Probes |
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Simulation |
Fabrication |
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Heart Probe |
Cell Probing |