Microelectronics Fabrication Laboratory
   
Charles D. Ellis, Director William Baugh, Equipment Eng
 

Education

Semiconductor Fabrication Course

The primary function of the AMSTC Microelectronics Laboratory is making sure our engineering students receive the best education possible. We do that by providing laboratory courses that allow the students to have hands-on experience. After completing these unique courses, our students will have obtained a high level of understanding about fabrication of semiconductor devices. Auburn is one of a handful of universities, across the nation that offers this type of training to both undergraduate and graduate students.

  Graduate Students
ECE 6370 Class Project Chip

Research

Facilities

The equipment in the AMSTC Microelectronics Laboratory includes an array of modern Integrated Circuit and Nano-Fabrication systems. We have upgraded Metallization, Deep Reactive Ion Etching, and Mask Aligning systems within the last year.

E-beam / Sputter System
Deep Reactive Ion Etcher
Double Sided Mask Aligner
 
 
Diffusion / Oxidation Furnace
LPCVD Furnace
 
MEMS (Micro Electro-Mechanical Systems ) and Bio Medical Probes
Simulation
Fabrication
 
Heart Probe
Cell Probing

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Bogdan M. Wilamowski
Director, Alabama Microelectronics Science and Technology Center
Auburn University