Monolithic Stress Sensors

Use monolithically fabricated piezoresistors to monitor package stresses

 

 

 


 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Bogdan M. Wilamowski
Director, Alabama Microelectronics Science and Technology Center
Auburn University